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Advanced Semiconductor Technology Laboratory

International journal
Recess-Free E-Mode AlGaN/GaN MIS-HFET with Crystalline PEALD AlN Passivation Process
Title Recess-Free E-Mode AlGaN/GaN MIS-HFET with Crystalline PEALD AlN Passivation Process
Info W.-H. Jang, J.-H. Yim, H.-T. Kim, and H.-Y. Cha
Name Electronics, Vol. 12(7), p. 1667, Mar, 2023
Link 관련링크 https://www.mdpi.com/2079-9292/12/7/1667 530회 연결
Recess-Free E-Mode AlGaN/GaN MIS-HFET with Crystalline PEALD AlN Passivation Process