Publication

Advanced Semiconductor Technology Laboratory

International conference
PEALD AlN passivation for enhancement-mode p-GaN Gated AlGaN/GaN HFET
Title PEALD AlN passivation for enhancement-mode p-GaN Gated AlGaN/GaN HFET
Info1 14th Topical Workshop on Heterostructure Microelectronics (TWHM 2022), Hiroshima, Japan, Aug. 29 - Sep.01, 2022
Info2 J.-H. Yim, W.-H. Jang, J.-J. Kim, H.-Y. Cha
Link 관련링크 https://www.rciqe.hokudai.ac.jp/twhm2022/ 70회 연결
PEALD AlN passivation for enhancement-mode p-GaN Gated AlGaN/GaN HFET

  • IEEE

  • Hongik
    University

  • Alimni

  • Professor

School of Electronic and Electrical Engineering
Hongik University
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