Publication

Advanced Semiconductor Technology Laboratory

International conference
Thin-AlGaN/GaN E-mode HFET with Atomic Layer Deposition Method AlN Film
Title Thin-AlGaN/GaN E-mode HFET with Atomic Layer Deposition Method AlN Film
Info1 International Workshop on Nitride Semiconductors 2022 (2022 IWN), Berlin, Germany, Oct. 9 - 14, 2022
Info2 W.-H. Jang, J.-H. Yim and H.-Y Cha
Link 관련링크 https://www.iwn2022.org/ 51회 연결
Thin-AlGaN/GaN E-mode HFET with Atomic Layer Deposition Method AlN Film