Thin-AlGaN/GaN E-mode HFET with Atomic Layer Deposition Method AlN Film | |
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Title | Thin-AlGaN/GaN E-mode HFET with Atomic Layer Deposition Method AlN Film |
Info1 | International Workshop on Nitride Semiconductors 2022 (2022 IWN), Berlin, Germany, Oct. 9 - 14, 2022 |
Info2 | W.-H. Jang, J.-H. Yim and H.-Y Cha |
Link | https://www.iwn2022.org/ 51회 연결 |