Publication

Advanced Semiconductor Technology Laboratory

Domestic conference
Enhancement-mode AlGaN/GaN HEMT Fabricated without Plasma Etching Process
Title Enhancement-mode AlGaN/GaN HEMT Fabricated without Plasma Etching Process
Info1 제 29회 한국반도체학술대회(The 29th Korean Conference on Semiconductors), Jeongseon, Korea, Jan. 24-26.
Info2 W.-H. Jang, J.-H. Yim, T.-H. Kim and H.-Y. Cha
Enhancement-mode AlGaN/GaN HEMT Fabricated without Plasma Etching Process