Thin-AlGaN/GaN MIS Gate HFET with ALD AlN | |
---|---|
Title | Thin-AlGaN/GaN MIS Gate HFET with ALD AlN |
Info1 | 제 30회 한국반도체학술대회(The 30th Korean Conference on Semiconductors), Jeongseon, Korea, Feb. 13-15 |
Info2 | W.-H. Jang, J.-H. Yim and H.-Y. Cha |
Advanced Semiconductor Technology Laboratory
Thin-AlGaN/GaN MIS Gate HFET with ALD AlN | |
---|---|
Title | Thin-AlGaN/GaN MIS Gate HFET with ALD AlN |
Info1 | 제 30회 한국반도체학술대회(The 30th Korean Conference on Semiconductors), Jeongseon, Korea, Feb. 13-15 |
Info2 | W.-H. Jang, J.-H. Yim and H.-Y. Cha |