Publication

Advanced Semiconductor Technology Laboratory

International conference
High quality pseudo-ALD silicon oxynitride (SiON) for E-mode AlGaN/GaN MIS-HEMTs
Title High quality pseudo-ALD silicon oxynitride (SiON) for E-mode AlGaN/GaN MIS-HEMTs
Info1 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices(AWAD), Hakodate, Japan, July 04-06, 2016.
Info2 M.-J. Kang, G.-H. Choi, H.-Y. Cha, and K.-S. Seo
Link 관련링크 http://www.ieice.org/~sdm/jpn/awad2016/doc/awad2016_program_final.pdf 190회 연결
High quality pseudo-ALD silicon oxynitride (SiON) for E-mode AlGaN/GaN MIS-HEMTs