High quality pseudo-ALD silicon oxynitride (SiON) for E-mode AlGaN/GaN MIS-HEMTs | |
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Title | High quality pseudo-ALD silicon oxynitride (SiON) for E-mode AlGaN/GaN MIS-HEMTs |
Info1 | Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices(AWAD), Hakodate, Japan, July 04-06, 2016. |
Info2 | M.-J. Kang, G.-H. Choi, H.-Y. Cha, and K.-S. Seo |
Link | http://www.ieice.org/~sdm/jpn/awad2016/doc/awad2016_program_final.pdf 190회 연결 |